| Measuring Range(测量范围): | | | |
| X-axis :300mm | | | |
| Y-axis :200mm | | | |
| Z-axis :150mm | | | |
| Measuring Uncertainty(测量精度): | | | |
| U2 (X,Y) = 2.0 + L/250 μm | | | |
| U1(Z)= 2.5 + L/250 μm | | | |
| Resolution(分辨率): | | | |
| 0.5 μm | | | |
| System Construction(系统构造): | | | |
| Precision lapped fine granite base(精密花岗岩平板) | | | |
| High precision cross table(高精密度的十字桌) | | | |
| Movingstage(运动轴承) | | | |
| Drive System(驱动系统): | | | |
| Backlash free ball screws through mass center(探头中心螺丝抗抖动（重液压）) | | | |
| Servo motor drive for CNC of 3 -axis(DC伺服马达CNC的3轴伺服马达) | | | |
| Precision Linear Motion guide system(精密线性运动指导系统) | | | |
| Positioning Speed(传送速度): | | | |
| 0∼300mm/sec | | | |
| Max. acceleration(加速度): | | | |
| 500mm/s² | | | |
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