Measuring Range(测量范围): | | | |
X-axis :400mm | | | |
Y-axis :300mm | | | |
Z-axis :150mm | | | |
Measuring Uncertainty(测量精度): | | | |
U2 (X,Y) = 1.9 + L/300 μm | | | |
U1(Z)= 2.5 + L/400 μm | | | |
Resolution(分辨率): | | | |
0.1 μm | | | |
System Construction(系统构造): | | | |
Precision lapped fine granite base(精密花岗岩平板) | | | |
High precision cross table(高精密度的十字桌) | | | |
Movingstage(运动轴承) | | | |
Drive System(驱动系统): | | | |
Backlash free ball screws through mass center(探头中心螺丝抗抖动(重液压)) | | | |
Servo motor drive for CNC of 3 -axis(DC伺服马达CNC的3轴伺服马达) | | | |
Precision Linear Motion guide system(精密线性运动指导系统) | | | |
Positioning Speed(传送速度): | | | |
0∼300mm/sec | | | |
Max. acceleration(加速度): | | | |
500mm/s² | | | |