| 体 | 规格 | 杂质含量(PPM) | 执行标准 | | 氩 | 99.999-99.9996% | 5N级N2≤2,H2≤1,总碳含量≤2,H2O≤4 | GB/T10624-1995 | | 氦 | ≥99% | Ne(H2),O2(Ar)≤5,N2,CH2总含量≤1%,H2O露点C-43 | GB/T4844.1.1995 | | 99.999-99.9996% | 4N级Ne≤40,H2≤7,O2(Ar)≤5,N2≤25,Co≤1,CO2≤1,CH4≤1,H2O≤20 | GB4844.2.1995 | | 99.999-99.9996% | 5N级Ne≤4,H2≤1,O2(Ar)≤1,N2≤2,Co≤0.5,CO2≤0.5,CH4≤0.5,H2O≤3 | GB/T4844.3.1995 | | 氖 | 99.99% | N2≤100,CO2≤1,CH4≤1 | | | 99.999% | N2≤3,He≤10,O2≤1,CO2≤0.5,CO≤1.0,CH4≤1,H2O≤3 | | | 氪 | 99.95% | Xe≤50,N2≤1.5,O2+Ar≤5,H2≤2,CO2≤1,CO≤1,CH4≤1,H2O≤3 | | | 99.99% | N2≤20,O2+Ar≤5,H2≤2,总碳≤3,H2O≤3,Xe≤50,总杂质含量≤100 | GB/T5829-1995 | | 99.995% | N2≤10,O2+Ar≤5,H2≤1,总碳≤2,H2O≤3,Xe≤30,总杂质含量≤50 | GB/T5829-1995 | | 99.999% | N2≤3,O2+Ar≤2,H2≤2,总碳≤1,H2O≤2.6,Xe≤4,总杂质含量≤10 | GB/T5829-1995 | | 氙 | 99.95% | CO2≤5,CO≤5,CH4≤5,N2O≤5,H2O≤5 | | | 99.99% | N2≤20,O2+Ar≤5,H2≤2,总碳≤3,H2O≤3,Kr≤50,N2O≤1,总杂质含量≤100 | GB/T5829-1995 | | 99.995% | N2≤10,O2+Ar≤4,H2≤1,总碳≤2,H2O≤3,Kr≤30,N2O≤1,总杂质含量≤50 | GB/T5829-1995 | | 99.999% | N2≤1,O2+Ar≤2,H2≤0.5,总碳≤1,H2O≤2.5,Kr≤4,N2O≤0.51,总杂质含量≤10 | GB/T5829-1995 |
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